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An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining.
Excimer lasers typically operate at ultraviolet wavelengths with major applications including semiconductor photolithography and LASIK eye surgery. Commonly used excimer molecules include ArF (emission at 193 nm), KrCl (222 nm), KrF (248 nm), XeCl (308 nm), and XeF (351 nm).
The electra laser at NRL is a KrF laser that demonstrated over 90,000 shots in 10 hours. A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser.
Excimer laser: 157 nm (F 2), 193.3 nm (ArF), 248 nm (KrF), 308 nm (XeCl), 351 nm (XeF) Excimer recombination via electrical discharge Ultraviolet lithography for semiconductor manufacturing, laser surgery, LASIK, scientific research.
The excimer laser uses an eye tracking system that follows the patient's eye position up to 4,000 times per second, redirecting laser pulses for precise placement within the treatment zone. Typical pulses are around 1 millijoule (mJ) of pulse energy in 10 to 20 nanoseconds.
The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer ...
Excimer lasers of deep ultra-violet light are mainly used in photoablation; the wavelength of laser used in photoablation is approximately 200 nm.
Current state-of-the-art photolithography tools use deep ultraviolet (DUV) light from excimer lasers with wavelengths of 248 (KrF) and 193 (ArF) nm (the dominant lithography technology today is thus also called "excimer laser lithography"), which allow minimum feature sizes down to 50 nm.
The most common methods today use excimer lasers to reshape the curvature of the cornea. Refractive eye surgeries are used to treat common vision disorders such as myopia , hyperopia , presbyopia and astigmatism .
Excimer laser – Type of ultraviolet laser important in chip manufacturing and eye surgery; Förster resonance energy transfer – Photochemical energy transfer mechanism; Krypton fluoride laser – type of excimer laser; Noble gas compound – Chemical compound containing a noble gas element