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  2. Excimer laser - Wikipedia

    en.wikipedia.org/wiki/Excimer_laser

    An excimer laser. An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining . Since the 1960s, excimer lasers have been widely used in high-resolution ...

  3. Krypton fluoride laser - Wikipedia

    en.wikipedia.org/wiki/Krypton_fluoride_laser

    A krypton fluoride laser ( KrF laser) is a particular type of excimer laser, [1] which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research.

  4. Laser - Wikipedia

    en.wikipedia.org/wiki/Laser

    Excimer lasers. Excimer lasers are a special sort of gas laser powered by an electric discharge in which the lasing medium is an excimer, or more precisely an exciplex in existing designs. These are molecules that can only exist with one atom in an excited electronic state. Once the molecule transfers its excitation energy to a photon, its ...

  5. Argon fluoride laser - Wikipedia

    en.wikipedia.org/wiki/Argon_fluoride_laser

    The argon fluoride laser (ArF laser) is a particular type of excimer laser, [1] which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research.

  6. Photolithography - Wikipedia

    en.wikipedia.org/wiki/Photolithography

    Excimer lasers are gas-based light systems that are usually filled with inert and halide gases (Kr, Ar, Xe, F and Cl) that are charged by an electric field. The higher the frequency, the greater the resolution of the image. KrF lasers are able to function at a frequency of 4 kHz . In addition to running at a higher frequency, excimer lasers are ...

  7. Nike laser - Wikipedia

    en.wikipedia.org/wiki/Nike_laser

    The Nike laser at the United States Naval Research Laboratory in Washington, DC is a 56-beam, 4–5 kJ per pulse electron beam pumped krypton fluoride excimer laser which operates in the ultraviolet at 248 nm with pulsewidths of a few nanoseconds. Nike was completed in the late 1980s and is used for investigations into inertial confinement fusion.